On the Coarse/Fine Dual-Stage Manipulators with Robust Perturbation Compensator

A dual-stage, fast and fine robotic manipulator is presented. By adopting merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We constructed an ultra precision XY manipulator with dual-stage structure where the PZT driven fine stage is mounted on the motor driven XY positioner and applied it to fine tracking controls and microteleoperations as a slave manipulator. We describe essential merits of the compound actuation mechanism and the control strategy to successfully utilize it with proper servo system design. Through experimental results, the effectiveness of the coarse/fine manipulation by the dual-stage manipulator is shown.